CUSTOM FABRICATION TO MEET YOUR NEEDS

We fulfill custom membrane fabrication requests for a wide range of applications, including:
  • High-resolution and environmental electron and x-ray microscopy
  • Protein and nanoparticle separations
  • Microfluidic cell culture
  • Genomic and photonic biosensors

OVERVIEW OF CUSTOM CAPABILITIES

Silicon Wafer Specifications

  • 100, 200, 300 micron thick; other thicknesses and CZ/FZ grown options
  • 100 mm (4-inch) diameter
  • 150 mm (6-inch) diameter

Custom mask design and mask printing

  • Feature size resolution to 350 nanometers (line/space resolution)
  • Minimum membrane window size typically ~5 microns
  • Maximum membrane window size (based on film) up to 25 mm x 25 mm

Front-to-back alignment lithography

  • Front-to-back tolerance +/-5 microns or better (+/-20 microns for 150mm)
  • Pores down to 500 nm can be etched in suspended membranes
  • Orientation or identification marks can be etched into suspended membrane or over support silicon to reduce interference with imaging

Metal Deposition

  • Deposition of aluminum, palladium, gold, (50 to 200 nm thicknesses)
  • Deposition of adhesive layer of titanium, chrome, etc..
  • Features to less than 10 microns with alignment to membrane windows within +/-5 microns.

Device Packaging

  • Devices are typically separated from the supporting wafer and packaged in transparent gel-boxes for ease of handling and viewing.
  • All devices are individually inspected under light microscopy
  • Devices can also be designed with continuous films for spin coating that can be later dissected along scribe lines by the customer

OUR MOST POPULAR MEMBRANES

Si

PURE SILICON

  • Amorphous, Single Crystal or nanocrystalline
  • Sputter deposited 5 to 50 nm thick
  • Nanocrystalline films are nanoporous with tunable pore sizes from 5 to 75 mm

SiO2

SILICON DIOXIDE

  • Amorphous silicon dioxide
  • GFLAT™ exclusive ultra flat oxide
  • Thermal, Sputter or PECVD deposition
  • Thicknesses from 20 to 4000 nm

SiXNY

SILICON NITRIDE

  • Amorphous silicon nitride
  • LPCVD Low stress – tunable
  • Thicknesses from 5 to 2000 nm
  • Ultra flat suspended membranes
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SiMPore Inc.
150 Lucius Gordon Dr. Suite 121
West Henrietta, NY 14586 USA
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Phone: +1 585 214 0585
Toll Free: 888 323 6266
Fax : 888 249 2935
E-mail: info@simpore.com