SILICON BASED MEMBRANES

We specialize in developing and manufacturing silicon-based membranes.  We use proprietary etching methods, along with the latest in MEMS and thin-film processing, to fabricate freely suspended silicon membranes.

We offer a range of materials that suit many biomedical and material science applications.

NANOPOROUS

Nanoporous Silicon Nitride

  • Patented, unique nanoporous membranes with scalable fabrication
  • 10 to 60 nm pore diameter with tunable pore distribution and porosity
  • 20 to 50 nm membrane thickness
  • < 10x10 µm to > 0.5x5 mm membrane area
  • See DesOrmeaux et al, Nanoscale 2014, for more details.

Nanoporous Silicon 

  • Patented, unique nanoporous membranes with scalable fabrication
  • 10 to 50 nm pore diameter with tunable pore distribution and porosity
  • 10 to 30 nm membrane thickness
  • < 10x10 µm to > 100x1500 µm membrane area
  • See Striemer et al, Nature 2007, for more details.

MICROPOROUS

Microporous G-FLAT™  Silicon Oxide

  • Patented, wrinkle-free membranes
  • 0.5 µ to > 10 µm diameter pores with specified porosity
  • 20 nm to > 1 µm membrane thickness
  • < 10x10 µm to > 2x2 mm membrane area
  • See Carter et al, Biofabrication 2017, for more details.

Microporous Silicon Nitride  

  • 0.5 µ to > 10 µm diameter pores with specified porosity
  • 20 nm to > 1 µm membrane thickness
  • < 10x10 µm to > 2x2 mm membrane area
  • Low-stress, non-stoichiometric by LPCVD

NON-POROUS

Silicon Nitride

  • 5 nm to > 1 µm membrane thickness
  • < 10x10 µm to 2x2 mm membrane area
  • Tunable stress and stoichiometry by LPCVD and PECVD

Silicon Oxide 

  • 20 nm to > 1 µm membrane thickness
  • < 10x10 µm to > 2x2 mm membrane area
  • Thermal, PECVD and RF magnetron sputter deposition

Pure Silicon 

  • 5 nm to > 500 nm membrane thickness
  • < 10x10 µm to > 2x2 mm membrane area
  • Amorphous by RF magnetron sputter deposition and poly-crystalline by PECVD
  • Also available: Single Crystal Pure Silicon

PATTERNED METAL MODIFICATIONS 

  • Features patterned with Au, Pt, Cr, Al, Rh, etc..
  • Micron-level feature resolution
  • Micron-level alignment to membranes
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SiMPore Inc.
150 Lucius Gordon Dr. Suite 110
West Henrietta, NY 14586 USA

Phone: +1 585 214 0585
Toll Free: 888 323 6266
Fax : 888 249 2935
E-mail: info@simpore.com